Inventor
AKIMOTO SATOSHI
JP15 patents
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CANON KK
9 patentsUS6359688B2Mar 19, 2002
Projection exposure apparatus and method of controlling same
CANON KK40 citations92
US6043500AMar 28, 2000
Exposure apparatus and its control method
CANON KK8 citations72
US9140997B2Sep 22, 2015
Control apparatus, lithography apparatus, and method of manufacturing article
CANON KK6 citations71
US7495771B2Feb 24, 2009
Exposure apparatus
CANON KK2 citations61
US7292348B2Nov 6, 2007
Stage apparatus including a correction unit to correct a wavelength variation of measurement light based on measured displacement of a stage
CANON KK5 citations61
US7280225B2Oct 9, 2007
Stage apparatus and control method including first and second measurement systems for measuring a stage position and a switching unit for switching between the measurement systems
CANON KK6 citations61
US6567154B2May 20, 2003
Step and scan projection exposure apparatus, maintenance method therefor, and semiconductor device manufacturing method and semiconductor manufacturing factory using the apparatus
CANON KK6 citations61
US7692760B2Apr 6, 2010
Liquid immersion exposure apparatus, method of controlling the same, and device manufacturing method
CANON KK1 citations51
US7158212B2Jan 2, 2007
Scanning exposure apparatus and device manufacturing method
CANON KK0 citations51