Inventor
MIYAGAWA MASAAKI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “MIYAGAWA MASAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS7658816B2Feb 9, 2010
Focus ring and plasma processing apparatus
TOKYO ELECTRON LTD36 citations91
US11841278B2Dec 12, 2023
Temperature measurement sensor, temperature measurement system, and temperature measurement method
TOKYO ELECTRON LTD2 citations72
US10290476B2May 14, 2019
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD3 citations71
US8043472B2Oct 25, 2011
Substrate processing apparatus and focus ring
TOKYO ELECTRON LTD5 citations62
US11035741B2Jun 15, 2021
Temperature measurement substrate and temperature measurement system
TOKYO ELECTRON LTD0 citations61
US7655579B2Feb 2, 2010
Method for improving heat transfer of a focus ring to a target substrate mounting device
TOKYO ELECTRON LTD2 citations61
US10068778B2Sep 4, 2018
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US9966291B2May 8, 2018
De-chuck control method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations41