Inventor

WAKAKI TOSHIKATSU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “WAKAKI TOSHIKATSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US7658816B2Feb 9, 2010

Focus ring and plasma processing apparatus

TOKYO ELECTRON LTD36 citations91

YOSHIDA RYOICHI

1 patent

US8821742B2Sep 2, 2014

Plasma etching method

YOSHIDA RYOICHI8 citations78

MURAKAMI TAKAHIRO

1 patent

US9337003B2May 10, 2016

Plasma processing apparatus and constituent part thereof

MURAKAMI TAKAHIRO3 citations69