Inventor
MIWA TOMONORI
JP5 patents
Patents
5 patentsUS7658816B2Feb 9, 2010
Focus ring and plasma processing apparatus
TOKYO ELECTRON LTD36 citations91
US9735021B2Aug 15, 2017
Etching method
TOKYO ELECTRON LTD2 citations68
US11264248B2Mar 1, 2022
Etching method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations53
US9418863B2Aug 16, 2016
Method for etching etching target layer
TOKYO ELECTRON LTD1 citations50
US9735025B2Aug 15, 2017
Etching method
TOKYO ELECTRON LTD0 citations38