Inventor
MARXSEN GERD
DE15 patents
⚠️ This page may combine multiple inventors who share the name “MARXSEN GERD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
9 patentsUS6184141B1Feb 6, 2001
Method for multiple phase polishing of a conductive layer in a semidonductor wafer
ADVANCED MICRO DEVICES INC64 citations96
US6620726B1Sep 16, 2003
Method of forming metal lines having improved uniformity on a substrate
ADVANCED MICRO DEVICES INC21 citations92
US7985329B2Jul 26, 2011
Technique for electrochemically depositing an alloy having a chemical order
ADVANCED MICRO DEVICES INC7 citations83
US6958247B2Oct 25, 2005
Method of electroplating copper over a patterned dielectric layer to enhance process uniformity of a subsequent CMP process
ADVANCED MICRO DEVICES INC10 citations72
US6752697B1Jun 22, 2004
Apparatus and method for chemical mechanical polishing of a substrate
ADVANCED MICRO DEVICES INC8 citations71
US6774030B2Aug 10, 2004
Method and system for improving the manufacturing of metal damascene structures
ADVANCED MICRO DEVICES INC2 citations62
US6761812B2Jul 13, 2004
Apparatus and method for electrochemical metal deposition
ADVANCED MICRO DEVICES INC6 citations62
US6957997B2Oct 25, 2005
Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner
ADVANCED MICRO DEVICES INC2 citations55
US7268000B2Sep 11, 2007
Method and system for controlling the chemical mechanical polishing of substrates by calculating an overpolishing time and/or a polishing time of a final polishing step
ADVANCED MICRO DEVICES INC0 citations39