Inventor

FELZER HEINZ

CH5 patents

⚠️ This page may combine multiple inventors who share the name “FELZER HEINZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OERLIKON ADVANCED TECH AG

2 patents

US9478420B2Oct 25, 2016

Method for depositing a group III nitride semiconductor film

OERLIKON ADVANCED TECH AG12 citations76

US9607831B2Mar 28, 2017

Method for depositing an aluminium nitride layer

OERLIKON ADVANCED TECH AG0 citations45

EVATEC AG

2 patents

US11551950B2Jan 10, 2023

Substrate processing apparatus and method of processing a substrate and of manufacturing a processed workpiece

EVATEC AG2 citations67

US11952654B2Apr 9, 2024

Liquid sputter target

EVATEC AG0 citations40

WEICHART JUERGEN

1 patent

US8268142B2Sep 18, 2012

RF sputtering arrangement

WEICHART JUERGEN3 citations59