Inventor

YIN WENSHENG

CN23 patents

⚠️ This page may combine multiple inventors who share the name “YIN WENSHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YIN WENSHENG

UNIV TSINGHUA

Three-DOF heterodyne grating interferometer displacement measurement system

Heterodyne grating interferometer displacement measurement system

Synchronous permanent magnet planar motor

High-resolution phase detection method and system based on plane grating laser interferometer

Optical grating phase modulator for laser interference photoetching system

Dual-frequency grating interferometer displacement measurement system

Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor

Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system

Method for measuring displacement of large-range moving platform

Coarse motion and fine motion integrated reticle stage driven by planar motor

Single degree of freedom vibration isolating device of linear motor and motion control method thereof

Scanning mechanism of an ion implanter

ZHU YU

Dual-stage switching system for lithographic machine

Micro stage with 6 degrees of freedom

Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof

Dual wafer stage exchanging system for lithographic device

Dual-stage exchange system for lithographic apparatus

Dual-stage exchange system for lithographic apparatus

SHANGHAI MICROELECTRONICS EQUI

Negative stiffness system for gravity compensation of micropositioner

Method for measuring displacement of planar motor rotor

Planar motor rotor displacement measuring device and its measuring method

ZHANG MING

Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space

HU JINCHUN

Two-dimensional locating method of motion platform based on magnetic steel array