Inventor
DUAN GUANGHONG
CN11 patents
⚠️ This page may combine multiple inventors who share the name “DUAN GUANGHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZHU YU
6 patentsUS8284380B2Oct 9, 2012
Dual-stage switching system for lithographic machine
ZHU YU2 citations62
US8084897B2Dec 27, 2011
Micro stage with 6 degrees of freedom
ZHU YU2 citations62
US8599361B2Dec 3, 2013
Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof
ZHU YU1 citations52
US9030648B2May 12, 2015
Dual wafer stage exchanging system for lithographic device
ZHU YU0 citations39
US8860927B2Oct 14, 2014
Dual-stage exchange system for lithographic apparatus
ZHU YU0 citations39
US8836918B2Sep 16, 2014
Dual-stage exchange system for lithographic apparatus
ZHU YU0 citations39
UNIV TSINGHUA
4 patentsUS6575676B2Jun 10, 2003
Parallel structure of a spatial 3-axis machine tool with three degrees-of-freedom
UNIV TSINGHUA63 citations91
US6402444B1Jun 11, 2002
Type of parallel machine tool frame driven by slider and extensible strut
UNIV TSINGHUA29 citations89
US7339289B2Mar 4, 2008
Synchronous permanent magnet planar motor
UNIV TSINGHUA8 citations70
US7259380B2Aug 21, 2007
Scanning mechanism of an ion implanter
UNIV TSINGHUA0 citations36