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Inventor
MORITA ETSURO
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “MORITA ETSURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI MATERIAL SILICON
1 patent
US6663708B1
Dec 16, 2003
Silicon wafer, and manufacturing method and heat treatment method of the same
MITSUBISHI MATERIAL SILICON
42 citations
91
SUMCO CORP
1 patent
US7867877B2
Jan 11, 2011
Method for manufacturing SOI wafer
SUMCO CORP
12 citations
82
SUMITOMO MITSUBISHI SILICON
1 patent
US7589023B2
Sep 15, 2009
Method of manufacturing semiconductor wafer
SUMITOMO MITSUBISHI SILICON
13 citations
82
TANIGUCHI TORU
1 patent
US8283252B2
Oct 9, 2012
Method of manufacturing semiconductor wafer
TANIGUCHI TORU
4 citations
59