Inventor
SEYA YUTA
JP4 patents
Patents
4 patentsUS9177823B2Nov 3, 2015
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD1 citations43
US10707088B2Jul 7, 2020
Method of processing target object
TOKYO ELECTRON LTD0 citations37
US10692726B2Jun 23, 2020
Method for processing workpiece
TOKYO ELECTRON LTD0 citations37
US9779962B2Oct 3, 2017
Plasma etching method
TOKYO ELECTRON LTD0 citations32