Inventor
PUTNA ERNISSE S
US6 patents
⚠️ This page may combine multiple inventors who share the name “PUTNA ERNISSE S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
5 patentsUS7678527B2Mar 16, 2010
Methods and compositions for providing photoresist with improved properties for contacting liquids
INTEL CORP11 citations82
US10459338B2Oct 29, 2019
Exposure activated chemically amplified directed self-assembly (DSA) for back end of line (BEOL) pattern cutting and plugging
INTEL CORP1 citations62
US7147985B2Dec 12, 2006
Resist compounds including acid labile groups having hydrophilic groups attached thereto
INTEL CORP5 citations60
US7241560B2Jul 10, 2007
Basic quencher/developer solutions for photoresists
INTEL CORP3 citations55
US7361455B2Apr 22, 2008
Anti-reflective coatings
INTEL CORP1 citations49