Inventor
IWAMOTO FUMIO
JP26 patents
⚠️ This page may combine multiple inventors who share the name “IWAMOTO FUMIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
19 patentsUS11067907B2Jul 20, 2021
Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method
GIGAPHOTON INC2 citations73
US10629414B2Apr 21, 2020
Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator
GIGAPHOTON INC2 citations73
US9894744B2Feb 13, 2018
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC3 citations73
US9883574B2Jan 30, 2018
Target producing apparatus
GIGAPHOTON INC2 citations73
US9854658B2Dec 26, 2017
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC2 citations73
US10028366B2Jul 17, 2018
Extreme UV light generation device and target recovery apparatus
GIGAPHOTON INC2 citations70
US10582600B2Mar 3, 2020
Droplet collection device
GIGAPHOTON INC2 citations69
US10225917B2Mar 5, 2019
Target supply device and extreme ultraviolet light generating device
GIGAPHOTON INC2 citations68
US12185449B2Dec 31, 2024
EUV light generation apparatus, electronic device manufacturing method, and inspection method
GIGAPHOTON INC0 citations62
US11659646B2May 23, 2023
Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
GIGAPHOTON INC0 citations62
US11360391B2Jun 14, 2022
Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method
GIGAPHOTON INC0 citations62
US10506697B2Dec 10, 2019
Extreme ultraviolet light generation device
GIGAPHOTON INC1 citations61
US10251253B2Apr 2, 2019
Extreme ultraviolet light generation device
GIGAPHOTON INC1 citations61
US12332575B2Jun 17, 2025
Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US10009991B2Jun 26, 2018
Target supply apparatus and EUV light generating apparatus
GIGAPHOTON INC1 citations52
US9949354B2Apr 17, 2018
Extreme UV light generation apparatus and method
GIGAPHOTON INC1 citations52
US9699877B2Jul 4, 2017
Extreme ultraviolet light generation apparatus including target droplet joining apparatus
GIGAPHOTON INC1 citations52
US11395398B2Jul 19, 2022
Extreme ultraviolet light generation apparatus and electronic device manufacturing method
GIGAPHOTON INC0 citations51
US10143074B2Nov 27, 2018
Filter and target supply apparatus
GIGAPHOTON INC0 citations37