Inventor
LICAUSI NICHOLAS VINCENT
US12 patents
Patents
12 patentsUS10002786B1Jun 19, 2018
Interconnection cells having variable width metal lines and fully-self aligned variable length continuity cuts
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US9553194B1Jan 24, 2017
Method for improved fin profile
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US9691775B1Jun 27, 2017
Combined SADP fins for semiconductor devices and methods of making the same
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US10043703B2Aug 7, 2018
Apparatus and method for forming interconnection lines having variable pitch and variable widths
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US9887127B1Feb 6, 2018
Interconnection lines having variable widths and partially self-aligned continuity cuts
GLOBALFOUNDRIES INC8 citations83
US9812351B1Nov 7, 2017
Interconnection cells having variable width metal lines and fully-self aligned continuity cuts
GLOBALFOUNDRIES INC18 citations83
US8932934B2Jan 13, 2015
Methods of self-forming barrier integration with pore stuffed ULK material
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US9508712B2Nov 29, 2016
Semiconductor device with a multiple nanowire channel structure and methods of variably connecting such nanowires for current density modulation
GLOBALFOUNDRIES INC17 citations79
US10083858B2Sep 25, 2018
Interconnection lines having variable widths and partially self-aligned continuity cuts
GLOBALFOUNDRIES INC5 citations72
US9054052B2Jun 9, 2015
Methods for integration of pore stuffing material
GLOBALFOUNDRIES INC3 citations62
US10008408B2Jun 26, 2018
Devices and methods of forming asymmetric line/space with barrierless metallization
GLOBALFOUNDRIES INC0 citations51
US9570344B2Feb 14, 2017
Method to protect MOL metallization from hardmask strip process
GLOBALFOUNDRIES INC0 citations49