Inventor
KAJIWARA KAORU
JP3 patents
Patents
3 patentsUS11473210B2Oct 18, 2022
Heat shielding member, single crystal pulling apparatus, and method of producing single crystal silicon ingot
SUMCO CORP0 citations45
US10724150B2Jul 28, 2020
Method of manufacturing silicon single crystal
SUMCO CORP0 citations45
US10494734B2Dec 3, 2019
Method for producing silicon single crystals
SUMCO CORP0 citations35