Inventor
NAGAI TSUTOMU
JP9 patents
⚠️ This page may combine multiple inventors who share the name “NAGAI TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS10679869B2Jun 9, 2020
Placing table and plasma treatment apparatus
TOKYO ELECTRON LTD2 citations71
US11373884B2Jun 28, 2022
Placing table and plasma treatment apparatus
TOKYO ELECTRON LTD1 citations60
US9093487B2Jul 28, 2015
Substrate mounting table and substrate processing apparatus
TOKYO ELECTRON LTD1 citations50