Inventor
TERUUCHI Satoru
JP5 patents
Patents
5 patentsUS10679869B2Jun 9, 2020
Placing table and plasma treatment apparatus
TOKYO ELECTRON LTD2 citations71
US12424424B2Sep 23, 2025
Plasma monitoring system, plasma monitoring method, and monitoring device
TOKYO ELECTRON LTD0 citations61
US11373884B2Jun 28, 2022
Placing table and plasma treatment apparatus
TOKYO ELECTRON LTD1 citations60
US10699883B2Jun 30, 2020
Plasma processing apparatus, method of operating plasma processing apparatus, and power supply device
TOKYO ELECTRON LTD1 citations56
US12142501B2Nov 12, 2024
Substrate processing system and temperature control method
TOKYO ELECTRON LTD0 citations49