Inventor
SHUSTERMAN TAL
IL3 patents
Patents
3 patentsUS10387608B2Aug 20, 2019
Metrology target identification, design and verification
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US9910953B2Mar 6, 2018
Metrology target identification, design and verification
KLA TENCOR CORP7 citations81
US10726169B2Jul 28, 2020
Target and process sensitivity analysis to requirements
KLA TENCOR CORP3 citations70