Inventor
SHOME KRISHANU
US15 patents
⚠️ This page may combine multiple inventors who share the name “SHOME KRISHANU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
13 patentsUS11971665B2Apr 30, 2024
Wafer alignment using form birefringence of targets or product
ASML HOLDING NV2 citations72
US10488767B2Nov 26, 2019
Alignment system wafer stack beam analyzer
ASML HOLDING NV2 citations69
US11899380B2Feb 13, 2024
Apparatus for and method of sensing alignment marks
ASML HOLDING NV0 citations61
US11789368B2Oct 17, 2023
Lithographic apparatus, metrology system, and illumination systems with structured illumination
ASML HOLDING NV0 citations61
US11531280B2Dec 20, 2022
Compact alignment sensor arrangements
ASML HOLDING NV1 citations61
US11703771B2Jul 18, 2023
Variable diffraction grating
ASML HOLDING NV0 citations54
US10732524B2Aug 4, 2020
Optical system of an alignment system
ASML HOLDING NV0 citations51
US10558131B2Feb 11, 2020
Polarization independent metrology system
ASML HOLDING NV0 citations51
US10338481B2Jul 2, 2019
Polarization independent metrology system
ASML HOLDING NV0 citations51
US11841628B2Dec 12, 2023
Apparatus for and method of sensing alignment marks
ASML HOLDING NV0 citations50
US11016396B2May 25, 2021
Method, substrate and apparatus to measure performance of optical metrology
ASML HOLDING NV0 citations47
US11513446B2Nov 29, 2022
Adaptive alignment
ASML HOLDING NV0 citations44
US11493852B2Nov 8, 2022
Noise correction for alignment signal
ASML HOLDING NV0 citations44