Inventor
LOF JOERI
NL91 patents
⚠️ This page may combine multiple inventors who share the name “LOF JOERI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
43 patentsUS7593092B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations99
US7593093B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations99
US7388648B2Jun 17, 2008
Lithographic projection apparatus
ASML NETHERLANDS BV136 citations99
US7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7199858B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV409 citations99
US7193232B2Mar 20, 2007
Lithographic apparatus and device manufacturing method with substrate measurement not through liquid
ASML NETHERLANDS BV216 citations99
US7081943B2Jul 25, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV199 citations99
US7075616B2Jul 11, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV366 citations99
US6952253B2Oct 4, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1,825 citations99
US7738074B2Jun 15, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV52 citations98
US7482611B2Jan 27, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV65 citations98
US7372541B2May 13, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV74 citations98
US7352434B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV178 citations98
US7224436B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV110 citations98
US7110081B2Sep 19, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV128 citations98
US7038760B2May 2, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV78 citations98
US7936444B2May 3, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV35 citations96
US7359030B2Apr 15, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV92 citations96
US7057702B2Jun 6, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV89 citations96
US9740107B2Aug 22, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations93
US9366972B2Jun 14, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US9360765B2Jun 7, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations93
US9097987B2Aug 4, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US7982850B2Jul 19, 2011
Immersion lithographic apparatus and device manufacturing method with gas supply
ASML NETHERLANDS BV14 citations93
US7932999B2Apr 26, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations93
US7795603B2Sep 14, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations93
US6936385B2Aug 30, 2005
Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods
ASML NETHERLANDS BV37 citations91
US9798246B2Oct 24, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9477160B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9383655B2Jul 5, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9091940B2Jul 28, 2015
Lithographic apparatus and method involving a fluid inlet and a fluid outlet
ASML NETHERLANDS BV5 citations84
US7808613B2Oct 5, 2010
Individual wafer history storage for overlay corrections
ASML NETHERLANDS BV17 citations84
US7442029B2Oct 28, 2008
Imprint lithography
ASML NETHERLANDS BV11 citations84
US7116404B2Oct 3, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations84
US7233384B2Jun 19, 2007
Lithographic apparatus and device manufacturing method, and device manufactured thereby for calibrating an imaging system with a sensor
ASML NETHERLANDS BV10 citations79
US7420676B2Sep 2, 2008
Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus
ASML NETHERLANDS BV19 citations78
US7197828B2Apr 3, 2007
Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement
ASML NETHERLANDS BV16 citations77
US6822730B2Nov 23, 2004
Substrate holder and device manufacturing method
ASML NETHERLANDS BV17 citations76
US7292339B2Nov 6, 2007
Alignment method and apparatus, lithographic apparatus, device manufacturing method, and alignment tool
ASML NETHERLANDS BV7 citations74
US10656538B2May 19, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10503084B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10620545B2Apr 14, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US7113258B2Sep 26, 2006
Lithographic apparatus
ASML NETHERLANDS BV9 citations70
LOF JOERI
6 patentsUS8482845B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI32 citations96
US8154708B2Apr 10, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI23 citations92
US9482966B2Nov 1, 2016
Lithographic apparatus and device manufacturing method
LOF JOERI12 citations84
US8797503B2Aug 5, 2014
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure
LOF JOERI5 citations84
US8472002B2Jun 25, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI7 citations84
US8558989B2Oct 15, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI3 citations74
ZEISS CARL SMT GMBH
1 patentShowing the top 50 of 91 patents by PatentIndex Score.