Inventor
WARDENIER PETER HANZEN
NL12 patents
⚠️ This page may combine multiple inventors who share the name “WARDENIER PETER HANZEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS7511799B2Mar 31, 2009
Lithographic projection apparatus and a device manufacturing method
ASML NETHERLANDS BV179 citations98
US10996573B2May 4, 2021
Method and system for increasing accuracy of pattern positioning
ASML NETHERLANDS BV2 citations71
US9958789B2May 1, 2018
Method of metrology, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations71
US9786044B2Oct 10, 2017
Method of measuring asymmetry, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV4 citations68
US11036146B2Jun 15, 2021
Method and apparatus to reduce effects of nonlinear behavior
ASML NETHERLANDS BV0 citations62
US12204826B2Jan 21, 2025
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV0 citations59
US11580274B2Feb 14, 2023
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV1 citations59
US10719011B2Jul 21, 2020
Method and apparatus to correct for patterning process error
ASML NETHERLANDS BV0 citations51
US10915689B2Feb 9, 2021
Method and apparatus to correct for patterning process error
ASML NETHERLANDS BV0 citations49
US10691863B2Jun 23, 2020
Method and apparatus to correct for patterning process error
ASML NETHERLANDS BV0 citations41