Inventor

KANEZAWA SHUN

JP2 patents

⚠️ This page may combine multiple inventors who share the name “KANEZAWA SHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAWAGUCHI MICHIHIRO

1 patent

US8779397B2Jul 15, 2014

Substrate cover and charged particle beam writing method using same

KAWAGUCHI MICHIHIRO1 citations41

NUFLARE TECHNOLOGY INC

1 patent

US11275044B2Mar 15, 2022

Anomaly determination method and writing apparatus

NUFLARE TECHNOLOGY INC0 citations36