Inventor
VAESSEN JEAN-PIERRE AGNES HENRICUS MARIE
NL6 patents
Patents
6 patentsUS10132763B2Nov 20, 2018
Inspection method and apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations72
US9958789B2May 1, 2018
Method of metrology, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations71
US10691030B2Jun 23, 2020
Measurement method, inspection apparatus, patterning device, lithographic system and device manufacturing method
ASML NETHERLANDS BV6 citations66
US11604419B2Mar 14, 2023
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV0 citations57
US11022897B2Jun 1, 2021
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV0 citations57
US10705430B2Jul 7, 2020
Method of measuring a parameter of interest, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV1 citations56