Inventor

VAN DER LAAN HANS

NL42 patents

⚠️ This page may combine multiple inventors who share the name “VAN DER LAAN HANS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VAN DER LAAN HANS

ASML NETHERLANDS BV

Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrations

Device inspection method and apparatus using an asymmetric marker

Method of measuring aberration in an optical imaging system

Method of measuring aberration of a projection system of a lithographic apparatus, device manufacturing method, and device manufactured thereby

Lithographic apparatus and a measurement system

Lithographic apparatus and device manufacturing method

Method of operating a lithographic apparatus, lithographic apparatus, method of manufacturing a device, and device manufactured thereby

Method for predicting a critical dimension of a feature imaged by a lithographic apparatus

Method of measuring aberration in an optical imaging system

Test pattern, inspection method, and device manufacturing method

Lithographic apparatus, device manufacturing method, and device manufactured thereby

Selection of measurement locations for patterning processes

Selection of measurement locations for patterning processes

Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method

Correction using stack difference

Method of metrology, inspection apparatus, lithographic system and device manufacturing method

Device manufacturing method and computer program

Substrate measurement recipe design of, or for, a target including a latent image

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method, and device manufactured thereby

Metrology method and apparatus and associated computer product

Lithographic apparatus, device manufacturing method, and device manufactured thereby

Test pattern, inspection method, and device manufacturing method

Selection of measurement locations for patterning processes

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method and device manufactured thereby

Metrology method and apparatus and associated computer product

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method, calibration method and computer program product

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

STAALS FRANK

Method of measuring a lithographic projection apparatus

Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product

VAN DER LAAN HANS

Device manufacturing method, computer program and lithographic apparatus

Method to determine the value of process parameters based on scatterometry data

ASM LITHOGRAPHY BV

Illumination unit for an optical apparatus

ASML NETHERLANDS

Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing method

DIERICHS MARCEL MATHIJS THEODORE MARIE

Lithographic apparatus and device manufacturing method

TEL WIM TJIBBO

Lithographic apparatus and device manufacturing method with radiation beam inspection using moveable reflecting device

KÖHLER CARSTEN ANDREAS

Calculating a laser metric within a lithographic apparatus and method thereof

VAN SCHOOT JAN BERNARD PLECHELMUS

Lithographic projection apparatus and method of compensating perturbation factors