Inventor
Wu cai-ling
TW11 patents
Patents
11 patentsUS11551968B2Jan 10, 2023
Inter-wire cavity for low capacitance
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations74
US11342222B2May 24, 2022
Self-aligned scheme for semiconductor device and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12550721B2Feb 10, 2026
Inter-wire cavity for low capacitance
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12341101B2Jun 24, 2025
Method for forming a semiconductor structure by diffusing manganese from a seed layer to a barrier layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12476146B2Nov 18, 2025
Self-aligned scheme for semiconductor device and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12387977B2Aug 12, 2025
Self-aligned scheme for semiconductor device and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11901228B2Feb 13, 2024
Self-aligned scheme for semiconductor device and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11830770B2Nov 28, 2023
Self-aligned scheme for semiconductor device and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12444646B2Oct 14, 2025
Devices with reduced capacitances
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12046506B2Jul 23, 2024
Devices with reduced capacitances
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12512363B2Dec 30, 2025
Forming interconnect structures in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51