Inventor
NOBUKUNI CHIKARA
JP5 patents
Patents
5 patentsUS10591935B2Mar 17, 2020
Substrate liquid processing apparatus and substrate liquid processing method
TOKYO ELECTRON LTD3 citations70
US11691172B2Jul 4, 2023
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD5 citations65
US12070769B2Aug 27, 2024
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD0 citations53
US10162371B2Dec 25, 2018
Substrate liquid processing apparatus and substrate liquid processing method
TOKYO ELECTRON LTD1 citations49
US11043399B2Jun 22, 2021
Substrate processing apparatus and operation method of substrate processing apparatus
TOKYO ELECTRON LTD0 citations45