Inventor
KASHIMURA RYUSEI
JP3 patents
Patents
3 patentsUS11664263B2May 30, 2023
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD3 citations68
US11456199B2Sep 27, 2022
Measurement method and measuring jig
TOKYO ELECTRON LTD2 citations68
US10720313B2Jul 21, 2020
Measuring device, measurement method, and plasma processing device
TOKYO ELECTRON LTD2 citations67