Inventor
TAKEISHI TOMOYUKI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “TAKEISHI TOMOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
14 patentsUS6742944B2Jun 1, 2004
Alkaline solution and manufacturing method, and alkaline solution applied to pattern forming method, resist film removing method, solution application method, substrate treatment method, solution supply method, and semiconductor device manufacturing method
TOSHIBA KK13 citations92
US7727853B2Jun 1, 2010
Processing method, manufacturing method of semiconductor device, and processing apparatus
TOSHIBA KK10 citations84
US7364839B2Apr 29, 2008
Method for forming a pattern and substrate-processing apparatus
TOSHIBA KK10 citations84
US7288466B2Oct 30, 2007
Processing method, manufacturing method of semiconductor device, and processing apparatus
TOSHIBA KK11 citations84
US7527918B2May 5, 2009
Pattern forming method and method for manufacturing a semiconductor device
TOSHIBA KK11 citations83
US7851363B2Dec 14, 2010
Pattern forming method and manufacturing method of semiconductor device
TOSHIBA KK7 citations74
US9202722B2Dec 1, 2015
Pattern forming method and manufacturing method of semiconductor device
TOSHIBA KK3 citations63
US7709383B2May 4, 2010
Film forming method, and substrate-processing apparatus
TOSHIBA KK3 citations63
US7399578B2Jul 15, 2008
Alkaline solution and manufacturing method, and alkaline solution applied to pattern forming method, resist film removing method, solution application method, substrate treatment method, solution supply method, and semiconductor device manufacturing method
TOSHIBA KK3 citations62
US7097960B2Aug 29, 2006
Alkaline solution and manufacturing method, and alkaline solution applied to pattern forming method, resist film removing method, solution application method, substrate treatment method, solution supply method, and semiconductor device manufacturing method
TOSHIBA KK1 citations62
US9601331B2Mar 21, 2017
Pattern forming method and manufacturing method of semiconductor device
TOSHIBA KK0 citations52
US7794923B2Sep 14, 2010
Substrate processing method, substrate processing apparatus, and manufacturing method of semiconductor device
TOSHIBA KK1 citations52
US9535328B2Jan 3, 2017
Developing apparatus and developing method
TOSHIBA KK1 citations51
US7968272B2Jun 28, 2011
Semiconductor device manufacturing method to form resist pattern
TOSHIBA KK0 citations42