Inventor
BERKENS MARTINUS MARIA
NL6 patents
⚠️ This page may combine multiple inventors who share the name “BERKENS MARTINUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BERKENS MARTINUS MARIA
2 patentsUS8151234B2Apr 3, 2012
Method for optimizing an integrated circuit physical layout
BERKENS MARTINUS MARIA18 citations73
US8621401B2Dec 31, 2013
Method of selecting a set of illumination conditions of a lithographic apparatus for optimizing an integrated circuit physical layout
BERKENS MARTINUS MARIA3 citations58