Inventor
YUHARA Tomoko
JP5 patents
Patents
5 patentsUS11506294B2Nov 22, 2022
Valve device, method for replacing valve body unit of valve device, and valve device assembly method
FUJIKIN KK4 citations71
US11022224B2Jun 1, 2021
Valve device, flow control method using the same, and semiconductor manufacturing method
FUJIKIN KK3 citations71
US11261990B2Mar 1, 2022
Actuator and valve device
FUJIKIN KK0 citations61
US11231121B2Jan 25, 2022
Actuator, valve device, and fluid control apparatus
FUJIKIN KK0 citations50
US11047503B2Jun 29, 2021
Actuator, valve device, and fluid supply system
FUJIKIN KK0 citations50