Inventor
KATSUMATA HIROFUMI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KATSUMATA HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA MACHINE CO LTD
4 patentsUS6250914B1Jun 26, 2001
Wafer heating device and method of controlling the same
TOSHIBA MACHINE CO LTD32 citations91
US5272644ADec 21, 1993
Apparatus for controlling a heating temperature
TOSHIBA MACHINE CO LTD24 citations90
US5486105AJan 23, 1996
Apparatus for controlling a heating temperature
TOSHIBA MACHINE CO LTD17 citations71
US4750104AJun 7, 1988
Method of and apparatus for tracking position error control
TOSHIBA MACHINE CO LTD14 citations71