Inventor
OKUMURA MASAHIKO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “OKUMURA MASAHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
13 patentsUS6122036ASep 19, 2000
Projection exposure apparatus and method
NIKON CORP624 citations98
US6400445B2Jun 4, 2002
Method and apparatus for positioning substrate
NIKON CORP87 citations97
US5985495ANov 16, 1999
Methods for measuring image-formation characteristics of a projection-optical system
NIKON CORP110 citations97
US6225012B1May 1, 2001
Method for positioning substrate
NIKON CORP57 citations96
US5654553AAug 5, 1997
Projection exposure apparatus having an alignment sensor for aligning a mask image with a substrate
NIKON CORP81 citations96
US7068350B2Jun 27, 2006
Exposure apparatus and stage device, and device manufacturing method
NIKON CORP27 citations92
US6842248B1Jan 11, 2005
System and method for calibrating mirrors of a stage assembly
NIKON CORP25 citations92
US6624433B2Sep 23, 2003
Method and apparatus for positioning substrate and the like
NIKON CORP50 citations92
US6141108AOct 31, 2000
Position control method in exposure apparatus
NIKON CORP20 citations92
US5473424ADec 5, 1995
Tilting apparatus
NIKON CORP32 citations92
US5798530AAug 25, 1998
Method and apparatus for aligning a mask and a set of substrates to be exposed
NIKON CORP13 citations73
US8040489B2Oct 18, 2011
Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid
NIKON CORP3 citations60
US7876452B2Jan 25, 2011
Interferometric position-measuring devices and methods
NIKON CORP0 citations41