Inventor
KARLSRUD CHRIS
US16 patents
⚠️ This page may combine multiple inventors who share the name “KARLSRUD CHRIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM IPEC CORP
11 patentsUS6520839B1Feb 18, 2003
Load and unload station for semiconductor wafers
SPEEDFAM IPEC CORP51 citations95
US6227946B1May 8, 2001
Robot assisted method of polishing, cleaning and drying workpieces
SPEEDFAM IPEC CORP42 citations95
US6213853B1Apr 10, 2001
Integral machine for polishing, cleaning, rinsing and drying workpieces
SPEEDFAM IPEC CORP58 citations94
US5989104ANov 23, 1999
Workpiece carrier with monopiece pressure plate and low gimbal point
SPEEDFAM IPEC CORP54 citations94
US6309279B1Oct 30, 2001
Arrangements for wafer polishing
SPEEDFAM IPEC CORP64 citations93
US6852007B1Feb 8, 2005
Robotic method of transferring workpieces to and from workstations
SPEEDFAM IPEC CORP20 citations92
US5975991ANov 2, 1999
Method and apparatus for processing workpieces with multiple polishing elements
SPEEDFAM IPEC CORP30 citations92
US6350177B1Feb 26, 2002
Combined CMP and wafer cleaning apparatus and associated methods
SPEEDFAM IPEC CORP17 citations91
US6364745B1Apr 2, 2002
Mapping system for semiconductor wafer cassettes
SPEEDFAM IPEC CORP10 citations80
US6390897B1May 21, 2002
Cleaning station integral with polishing machine for semiconductor wafers
SPEEDFAM IPEC CORP6 citations73
US6125861AOct 3, 2000
Post-CMP wet-HF cleaning station
SPEEDFAM IPEC CORP9 citations70
SPEEDFAM CORP
5 patentsUS5872633AFeb 16, 1999
Methods and apparatus for detecting removal of thin film layers during planarization
SPEEDFAM CORP390 citations98
US5569062AOct 29, 1996
Polishing pad conditioning
SPEEDFAM CORP156 citations98
US5954888ASep 21, 1999
Post-CMP wet-HF cleaning station
SPEEDFAM CORP28 citations92
US5791978AAug 11, 1998
Bearing assembly for wafer planarization carrier
SPEEDFAM CORP12 citations71
US5834645ANov 10, 1998
Methods and apparatus for the in-process detection of workpieces with a physical contact probe
SPEEDFAM CORP12 citations67