Inventor
DESHPANDEY CHANDRA
US12 patents
⚠️ This page may combine multiple inventors who share the name “DESHPANDEY CHANDRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS5996218ADec 7, 1999
Method of forming an electrostatic chuck suitable for magnetic flux processing
APPLIED MATERIALS INC160 citations99
US5592358AJan 7, 1997
Electrostatic chuck for magnetic flux processing
APPLIED MATERIALS INC307 citations99
US6557248B1May 6, 2003
Method of fabricating an electrostatic chuck
APPLIED MATERIALS INC47 citations94
US6023405AFeb 8, 2000
Electrostatic chuck with improved erosion resistance
APPLIED MATERIALS INC56 citations94
US5822171AOct 13, 1998
Electrostatic chuck with improved erosion resistance
APPLIED MATERIALS INC74 citations94
US5636098AJun 3, 1997
Barrier seal for electrostatic chuck
APPLIED MATERIALS INC85 citations94
US5631803AMay 20, 1997
Erosion resistant electrostatic chuck with improved cooling system
APPLIED MATERIALS INC95 citations94
US6033483AMar 7, 2000
Electrically insulating sealing structure and its method of use in a high vacuum physical vapor deposition apparatus
APPLIED MATERIALS INC16 citations90
US6436509B1Aug 20, 2002
Electrically insulating sealing structure and its method of use in a semiconductor manufacturing apparatus
APPLIED MATERIALS INC10 citations71
US6821562B2Nov 23, 2004
Method of forming an electrically insulating sealing structure for use in a semiconductor manufacturing apparatus
APPLIED MATERIALS INC3 citations60