Inventor
NIIYAMA HIROMI
JP7 patents
Patents
7 patentsUS6465290B1Oct 15, 2002
Method of manufacturing a semiconductor device using a polymer film pattern
TOSHIBA KK88 citations98
US5592024AJan 7, 1997
Semiconductor device having a wiring layer with a barrier layer
TOSHIBA KK133 citations98
US6794286B2Sep 21, 2004
Process for fabricating a metal wiring and metal contact in a semicondutor device
TOSHIBA KK55 citations96
US6090699AJul 18, 2000
Method of making a semiconductor device
TOSHIBA KK35 citations92
US6020107AFeb 1, 2000
Pattern forming method through combined electron beam and light exposure utilizing multiple heat steps
TOSHIBA KK22 citations92
US5994030ANov 30, 1999
Pattern-forming method and lithographic system
TOSHIBA KK23 citations92
US6093931AJul 25, 2000
Pattern-forming method and lithographic system
TOSHIBA KK11 citations73