Inventor
CHEN YIKAI
US19 patents
⚠️ This page may combine multiple inventors who share the name “CHEN YIKAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
16 patentsUS10468235B2Nov 5, 2019
Plasma spray coating enhancement using plasma flame heat treatment
APPLIED MATERIALS INC2 citations73
US11572617B2Feb 7, 2023
Protective metal oxy-fluoride coatings
APPLIED MATERIALS INC3 citations72
US10385459B2Aug 20, 2019
Advanced layered bulk ceramics via field assisted sintering technology
APPLIED MATERIALS INC3 citations72
US10196728B2Feb 5, 2019
Plasma spray coating design using phase and stress control
APPLIED MATERIALS INC3 citations72
US10818481B2Oct 27, 2020
Smart device fabrication via precision patterning
APPLIED MATERIALS INC2 citations71
US11866821B2Jan 9, 2024
Substrate support cover for high-temperature corrosive environment
APPLIED MATERIALS INC2 citations69
US11578398B2Feb 14, 2023
Plasma spray coating design using phase and stress control
APPLIED MATERIALS INC0 citations62
US12492464B2Dec 9, 2025
Protective metal oxy-fluoride coatings
APPLIED MATERIALS INC0 citations61
US9420639B2Aug 16, 2016
Smart device fabrication via precision patterning
APPLIED MATERIALS INC2 citations60
US12431338B2Sep 30, 2025
Composite structures for semiconductor process chambers
APPLIED MATERIALS INC0 citations56
US11047035B2Jun 29, 2021
Protective yttria coating for semiconductor equipment parts
APPLIED MATERIALS INC1 citations56
US11251024B2Feb 15, 2022
Coating for chamber particle reduction
APPLIED MATERIALS INC0 citations55
US10604831B2Mar 31, 2020
Plasma spray coating design using phase and stress control
APPLIED MATERIALS INC0 citations51
US9999907B2Jun 19, 2018
Cleaning process that precipitates yttrium oxy-flouride
APPLIED MATERIALS INC0 citations51
US12592364B2Mar 31, 2026
Fluoride coating to improve chamber performance
APPLIED MATERIALS INC0 citations46
US10730798B2Aug 4, 2020
Slurry plasma spray of plasma resistant ceramic coating
APPLIED MATERIALS INC0 citations41