Inventor
KANUNGO BIRAJA PRASAD
US17 patents
Patents
17 patentsUS9343289B2May 17, 2016
Chemistry compatible coating material for advanced device on-wafer particle performance
APPLIED MATERIALS INC26 citations94
US9725799B2Aug 8, 2017
Ion beam sputtering with ion assisted deposition for coatings on chamber components
APPLIED MATERIALS INC15 citations92
US9687953B2Jun 27, 2017
Chamber components with polished internal apertures
APPLIED MATERIALS INC4 citations82
US12195839B2Jan 14, 2025
Ion beam sputtering with ion assisted deposition for coatings on chamber components
APPLIED MATERIALS INC1 citations74
US9797037B2Oct 24, 2017
Ion beam sputtering with ion assisted deposition for coatings on chamber components
APPLIED MATERIALS INC2 citations73
US10385459B2Aug 20, 2019
Advanced layered bulk ceramics via field assisted sintering technology
APPLIED MATERIALS INC3 citations72
US10196728B2Feb 5, 2019
Plasma spray coating design using phase and stress control
APPLIED MATERIALS INC3 citations72
US11578398B2Feb 14, 2023
Plasma spray coating design using phase and stress control
APPLIED MATERIALS INC0 citations62
US11566319B2Jan 31, 2023
Ion beam sputtering with ion assisted deposition for coatings on chamber components
APPLIED MATERIALS INC0 citations62
US11566318B2Jan 31, 2023
Ion beam sputtering with ion assisted deposition for coatings on chamber components
APPLIED MATERIALS INC0 citations62
US11566317B2Jan 31, 2023
Ion beam sputtering with ion assisted deposition for coatings on chamber components
APPLIED MATERIALS INC0 citations62
US12162115B2Dec 10, 2024
Chamber components with polished internal apertures
APPLIED MATERIALS INC0 citations61
US11724353B2Aug 15, 2023
Chamber components with polished internal apertures
APPLIED MATERIALS INC0 citations61
US11370078B2Jun 28, 2022
Chamber components with polished internal apertures
APPLIED MATERIALS INC0 citations61
US10604831B2Mar 31, 2020
Plasma spray coating design using phase and stress control
APPLIED MATERIALS INC0 citations51
US10189141B2Jan 29, 2019
Chamber components with polished internal apertures
APPLIED MATERIALS INC0 citations50
US10730798B2Aug 4, 2020
Slurry plasma spray of plasma resistant ceramic coating
APPLIED MATERIALS INC0 citations41