Inventor

SEES JENNIFER

US2 patents

Patents

2 patents

US6448182B1Sep 10, 2002

Stabilization of peroxygen-containing slurries used in a chemical mechanical planarization

TEXAS INSTRUMENTS INC18 citations89

US6145372ANov 14, 2000

Apparatus and method for detecting impurities in wet chemicals

TEXAS INSTRUMENTS INC2 citations56