Inventor
IKENAGA OSAMU
JP15 patents
⚠️ This page may combine multiple inventors who share the name “IKENAGA OSAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
13 patentsUS6649310B2Nov 18, 2003
Method of manufacturing photomask
TOSHIBA KK26 citations92
US4989156AJan 29, 1991
Method of drawing a pattern on wafer with charged beam
TOSHIBA KK40 citations92
US4878177AOct 31, 1989
Method for drawing a desired circuit pattern using charged particle beam
TOSHIBA KK32 citations92
US4623256ANov 18, 1986
Apparatus for inspecting mask used for manufacturing integrated circuits
TOSHIBA KK41 citations92
US7090949B2Aug 15, 2006
Method of manufacturing a photo mask and method of manufacturing a semiconductor device
TOSHIBA KK14 citations84
US7735055B2Jun 8, 2010
Method of creating photo mask data, method of photo mask manufacturing, and method of manufacturing semiconductor device
TOSHIBA KK8 citations82
US7008731B2Mar 7, 2006
Method of manufacturing a photomask and method of manufacturing a semiconductor device using the photomask
TOSHIBA KK7 citations73
US6333213B2Dec 25, 2001
Method of forming photomask and method of manufacturing semiconductor device
TOSHIBA KK13 citations67
US7229721B2Jun 12, 2007
Method for evaluating photo mask and method for manufacturing semiconductor device
TOSHIBA KK6 citations62
US8036446B2Oct 11, 2011
Semiconductor mask inspection using die-to-die and die-to-database comparisons
TOSHIBA KK3 citations60
US7742162B2Jun 22, 2010
Mask defect inspection data generating method, mask defect inspection method and mask production method
TOSHIBA KK5 citations60
US7222327B2May 22, 2007
Photo mask, method of manufacturing photo mask, and method of generating mask data
TOSHIBA KK3 citations60
US7912275B2Mar 22, 2011
Method of evaluating a photo mask and method of manufacturing a semiconductor device
TOSHIBA KK0 citations51