Inventor
ZUO RASON
CN8 patents
Patents
8 patentsUS11676803B2Jun 13, 2023
Liner assembly for vacuum treatment apparatus, and vacuum treatment apparatus
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations59
US12094693B2Sep 17, 2024
Bottom electrode assembly, plasma processing apparatus, and method of replacing focus ring
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations50
US12341037B2Jun 24, 2025
Temperature control apparatus for semiconductor processing equipment, and temperature control method for the same
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations49
US11371141B2Jun 28, 2022
Plasma process apparatus with low particle contamination and method of operating the same
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations49
US11621149B2Apr 4, 2023
Corrosion-resistant gas delivery assembly, and plasma processing apparatus
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations47
US12309891B2May 20, 2025
Control method for multi-zone active-matrix temperature control in plasma processing apparatus
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations46
US11348763B2May 31, 2022
Corrosion-resistant structure for a gas delivery system in a plasma processing apparatus
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations46
US11387084B2Jul 12, 2022
Uniform pumping dual-station vacuum processor
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations43