Inventor
SHARPLES JUDSON R
US5 patents
Patents
5 patentsUS6368194B1Apr 9, 2002
Apparatus for controlling PH during planarization and cleaning of microelectronic substrates
MICRON TECHNOLOGY INC135 citations97
US6220934B1Apr 24, 2001
Method for controlling pH during planarization and cleaning of microelectronic substrates
MICRON TECHNOLOGY INC100 citations97
US7214125B2May 8, 2007
Method for controlling pH during planarization and cleaning of microelectronic substrates
MICRON TECHNOLOGY INC9 citations72
US6913523B2Jul 5, 2005
Method for controlling pH during planarization and cleaning of microelectronic substrates
MICRON TECHNOLOGY INC4 citations72
US6716089B2Apr 6, 2004
Method for controlling pH during planarization and cleaning of microelectronic substrates
MICRON TECHNOLOGY INC5 citations72