Inventor

TONG JOSE

US4 patents

⚠️ This page may combine multiple inventors who share the name “TONG JOSE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents

US7252738B2Aug 7, 2007

Apparatus for reducing polymer deposition on a substrate and substrate support

LAM RES CORP60 citations96

US7867356B2Jan 11, 2011

Apparatus for reducing polymer deposition on a substrate and substrate support

LAM RES CORP15 citations82

US7093560B2Aug 22, 2006

Techniques for reducing arcing-related damage in a clamping ring of a plasma processing system

LAM RES CORP15 citations82

TONG JOSE

1 patent

US8703249B2Apr 22, 2014

Techniques for reducing arcing-related damage in a clamping ring of a plasma processing system

TONG JOSE4 citations66