Inventor
SCHEER STEVEN
US20 patents
⚠️ This page may combine multiple inventors who share the name “SCHEER STEVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS7829269B1Nov 9, 2010
Dual tone development with plural photo-acid generators in lithographic applications
TOKYO ELECTRON LTD32 citations92
US7673278B2Mar 2, 2010
Enhanced process yield using a hot-spot library
TOKYO ELECTRON LTD26 citations91
US10020195B2Jul 10, 2018
Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists
TOKYO ELECTRON LTD8 citations83
US7483804B2Jan 27, 2009
Method of real time dynamic CD control
TOKYO ELECTRON LTD7 citations73
US9454081B2Sep 27, 2016
Line pattern collapse mitigation through gap-fill material application
TOKYO ELECTRON LTD4 citations72
US9085045B2Jul 21, 2015
Method and system for controlling a spike anneal process
TOKYO ELECTRON LTD4 citations72
US12165870B2Dec 10, 2024
Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists
TOKYO ELECTRON LTD0 citations62
FONSECA CARLOS A
5 patentsUS8129080B2Mar 6, 2012
Variable resist protecting groups
FONSECA CARLOS A13 citations82
US8197996B2Jun 12, 2012
Dual tone development processes
FONSECA CARLOS A6 citations71
US8574810B2Nov 5, 2013
Dual tone development with a photo-activated acid enhancement component in lithographic applications
FONSECA CARLOS A2 citations61
US8283111B2Oct 9, 2012
Method for creating gray-scale features for dual tone development processes
FONSECA CARLOS A5 citations61
US8568964B2Oct 29, 2013
Flood exposure process for dual tone development in lithographic applications
FONSECA CARLOS A0 citations51