Inventor
SCHOEPP ALAN
US11 patents
⚠️ This page may combine multiple inventors who share the name “SCHOEPP ALAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS6669783B2Dec 30, 2003
High temperature electrostatic chuck
LAM RES CORP92 citations95
US6567258B2May 20, 2003
High temperature electrostatic chuck
LAM RES CORP17 citations90
US6377437B1Apr 23, 2002
High temperature electrostatic chuck
LAM RES CORP41 citations90
US7625452B2Dec 1, 2009
Apparatuses and methods for cleaning a substrate
LAM RES CORP2 citations62
US7441299B2Oct 28, 2008
Apparatuses and methods for cleaning a substrate
LAM RES CORP3 citations62
US7542134B2Jun 2, 2009
System, method and apparatus for in-situ substrate inspection
LAM RES CORP4 citations60
US12198896B2Jan 14, 2025
Compact high density plasma source
LAM RES CORP1 citations59
US8940098B2Jan 27, 2015
Method for distributing gas for a bevel etcher
LAM RES CORP0 citations51
US7397555B2Jul 8, 2008
System, method and apparatus for in-situ substrate inspection
LAM RES CORP1 citations49
US10808317B2Oct 20, 2020
Deposition apparatus including an isothermal processing zone
LAM RES CORP0 citations41