Inventor

OLSON JOSEPH C

US117 patents

⚠️ This page may combine multiple inventors who share the name “OLSON JOSEPH C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OLSON JOSEPH C

VARIAN SEMICONDUCTOR EQUIPMENT

Control system for indirectly heated cathode ion source

Methods and apparatus for adjusting beam parallelism in ion implanters

Method and apparatus for determining beam parallelism and direction

Bi mode ion implantation with non-parallel ion beams

Methods and apparatus for scanning and focusing an ion beam

Indirectly heated cathode ion source

Methods and apparatus for alignment of ion beam systems using beam current sensors

Apparatus and method for controllably implanting workpieces

Method and system for controlling critical dimension and roughness in resist features

Technique for ion beam angle spread control

Uniformity control multiple tilt axes, rotating wafer and variable scan velocity

Techniques for providing ion source feed materials

Technique for uniformity tuning in an ion implanter system

Source arc chamber for ion implanter having repeller electrode mounted to external insulator

Methods and apparatus for scanned beam uniformity adjustment in ion implanters

Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms

Ion beam current uniformity monitor, ion implanter and related method

Apparatus and techniques for controlling ion implantation uniformity

Technique for uniformity tuning in an ion implanter system

Ion beam implant current, spot width and position tuning

Cathode assembly for indirectly heated cathode ion source

Uniformity control using multiple fixed wafer orientations and variable scan velocity

Dual mode ion implanter

Ion beam neutral detection

APPLIED MATERIALS INC

Method of forming a plurality of gratings

Optical component having depth modulated angled gratings and method of formation

Methods of producing slanted gratings with variable etch depths

Controlling etch angles by substrate rotation in angled etch tools

System and method for detecting etch depth of angled surface relief gratings

Electric/magnetic field guided acid diffusion

Modulation of rolling k vectors of angled gratings

Electrodynamic mass analysis with RF biased ion source

Method of forming gratings

Modulation of rolling K vectors of angled gratings

Formation of angled gratings

Modulation of ion beam angle

Methods of producing slanted gratings with variable etch depths

Techniques for forming angled structures

Apparatus, system and techniques for mass analyzed ion beam

Gate all around device and method of formation using angled ions

Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions

Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions

Shadow mask apparatus and methods for variable etch depths

Ion beam source for optical device fabrication using a segmented ion source having one or more angled surfaces

Methods of optical device fabrication using an ion beam source

GODET LUDOVIC

Method and system for modifying patterned photoresist using multi-step ion implantation

Ion source

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Electrodynamic mass analysis

System and methods using an inline surface engineering source

VARIAN SEMICONDUCTOR ASSOCIATE

Methods and apparatus for beam density measurement in two dimensions