Inventor

EVANS MORGAN

US61 patents

⚠️ This page may combine multiple inventors who share the name “EVANS MORGAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EVANS MORGAN

APPLIED MATERIALS INC

Method of forming a plurality of gratings

Optical component having depth modulated angled gratings and method of formation

Methods of producing slanted gratings with variable etch depths

Controlling etch angles by substrate rotation in angled etch tools

System and method for detecting etch depth of angled surface relief gratings

Modulation of rolling k vectors of angled gratings

Method of forming gratings

Variable height slanted grating method

Modulation of rolling K vectors of angled gratings

Formation of angled gratings

Modulation of ion beam angle

Methods of producing slanted gratings with variable etch depths

Techniques for forming angled structures

Methods and systems for multi-area selective etching

Gate all around device and method of formation using angled ions

Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions

Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions

Forming variable depth structures with laser ablation

Method and device for a carrier proximity mask

Methods of producing slanted gratings

Shadow mask apparatus and methods for variable etch depths

Methods for controlling etch depth by localized heating

Gate all around device and method of formation using angled ions

Variable height slanted grating method

Modulation of rolling k vectors of angled gratings

Forming variable depth structures with laser ablation

Apparatus and techniques for angled etching using multielectrode extraction source

Method of forming a plurality of gratings

Controlling etch angles by substrate rotation in angled etch tools

Apparatus and techniques for angled etching using multielectrode extraction source

Methods of forming devices on a substrate

Gate devices and methods of formation using angled ions

Concurrent or cyclical etch and directional deposition

Methods for variable etch depths

Shadow mask apparatus and methods for variable etch depths

Method and device for a carrier proximity mask

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

System and method for optimally forming gratings of diffracted optical elements

System and method for forming diffracted optical element having varied gratings

System and method for optimally forming gratings of diffracted optical elements

System and method for optimally forming gratings of diffracted optical elements

System and method for forming diffracted optical element having varied gratings

Techniques for processing a polycrystalline layer using an angled ion beam

Optical component having variable depth gratings and method of formation

Device structure for forming semiconductor device having angled contacts

Optical component having variable depth gratings and method of formation

Device structure for forming semiconductor device having angled contacts

System and method for forming diffracted optical element having varied gratings

VARIAN SEMICONDUCTOR EQUIPMENT

Ion beam incidence angle and beam divergence monitor

Ion beam current monitoring

EVANS MORGAN

Crutches