Inventor
MEYER TIMMERMAN THIJSSEN RUTGER
US78 patents
⚠️ This page may combine multiple inventors who share the name “MEYER TIMMERMAN THIJSSEN RUTGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
48 patentsUS11247298B2Feb 15, 2022
Method of forming a plurality of gratings
APPLIED MATERIALS INC9 citations86
US10935799B2Mar 2, 2021
Optical component having depth modulated angled gratings and method of formation
APPLIED MATERIALS INC10 citations86
US10823888B1Nov 3, 2020
Methods of producing slanted gratings with variable etch depths
APPLIED MATERIALS INC15 citations86
US10302826B1May 28, 2019
Controlling etch angles by substrate rotation in angled etch tools
APPLIED MATERIALS INC15 citations86
US10234630B2Mar 19, 2019
Method for creating a high refractive index wave guide
APPLIED MATERIALS INC15 citations86
US10775158B2Sep 15, 2020
System and method for detecting etch depth of angled surface relief gratings
APPLIED MATERIALS INC7 citations84
US11670482B2Jun 6, 2023
Modulation of rolling k vectors of angled gratings
APPLIED MATERIALS INC1 citations73
US11512385B2Nov 29, 2022
Method of forming gratings
APPLIED MATERIALS INC3 citations73
US11480724B2Oct 25, 2022
Variable height slanted grating method
APPLIED MATERIALS INC3 citations73
US11456152B2Sep 27, 2022
Modulation of rolling K vectors of angled gratings
APPLIED MATERIALS INC2 citations73
US11380578B2Jul 5, 2022
Formation of angled gratings
APPLIED MATERIALS INC2 citations73
US11372149B2Jun 28, 2022
Depth-modulated slanted gratings using gray-tone lithography and slant etch
APPLIED MATERIALS INC4 citations73
US11367589B2Jun 21, 2022
Modulation of ion beam angle
APPLIED MATERIALS INC1 citations73
US11333896B2May 17, 2022
Fabrication of diffraction gratings
APPLIED MATERIALS INC4 citations73
US11226441B2Jan 18, 2022
Methods of producing slanted gratings with variable etch depths
APPLIED MATERIALS INC4 citations73
US11222809B2Jan 11, 2022
Patterned vacuum chuck for double-sided processing
APPLIED MATERIALS INC2 citations73
US11119405B2Sep 14, 2021
Techniques for forming angled structures
APPLIED MATERIALS INC5 citations73
US11112694B2Sep 7, 2021
Methods of forming variable-depth device structures
APPLIED MATERIALS INC5 citations73
US11029206B2Jun 8, 2021
Methods and apparatus for waveguide metrology
APPLIED MATERIALS INC5 citations73
US11004648B2May 11, 2021
Methods and systems for multi-area selective etching
APPLIED MATERIALS INC2 citations73
US11662524B2May 30, 2023
Forming variable depth structures with laser ablation
APPLIED MATERIALS INC2 citations72
US11487139B2Nov 1, 2022
Nanostructures for optical devices
APPLIED MATERIALS INC3 citations72
US10957512B1Mar 23, 2021
Method and device for a carrier proximity mask
APPLIED MATERIALS INC2 citations71
US10690821B1Jun 23, 2020
Methods of producing slanted gratings
APPLIED MATERIALS INC6 citations71
US11335531B2May 17, 2022
Shadow mask apparatus and methods for variable etch depths
APPLIED MATERIALS INC2 citations68
US11810755B2Nov 7, 2023
Ion beam source for optical device fabrication using a segmented ion source having one or more angled surfaces
APPLIED MATERIALS INC0 citations63
US11764099B2Sep 19, 2023
Patterned chuck for double-sided processing
APPLIED MATERIALS INC0 citations63
US11640898B2May 2, 2023
Methods of optical device fabrication using an ion beam source
APPLIED MATERIALS INC0 citations63
US11581189B2Feb 14, 2023
Controlled hardmask shaping to create tapered slanted fins
APPLIED MATERIALS INC0 citations63
US11289361B2Mar 29, 2022
Patterned chuck for double-sided processing
APPLIED MATERIALS INC0 citations63
US11171010B2Nov 9, 2021
Controlled hardmask shaping to create tapered slanted fins
APPLIED MATERIALS INC0 citations63
US12516410B2Jan 6, 2026
Dielectric filled nanostructured silica substrate for flat optical devices
APPLIED MATERIALS INC0 citations62
US12454751B2Oct 28, 2025
Atomic layer deposition on optical structures
APPLIED MATERIALS INC0 citations62
US12181736B2Dec 31, 2024
Nanostructures for optical devices
APPLIED MATERIALS INC0 citations62
US12130465B2Oct 29, 2024
Variable height slanted grating method
APPLIED MATERIALS INC0 citations62
US12117629B2Oct 15, 2024
Fabrication of optical devices utilizing dicing to maximize chamber space
APPLIED MATERIALS INC0 citations62
US12106935B2Oct 1, 2024
Modulation of rolling k vectors of angled gratings
APPLIED MATERIALS INC0 citations62
US12099241B2Sep 24, 2024
Forming variable depth structures with laser ablation
APPLIED MATERIALS INC0 citations62
US11977246B2May 7, 2024
Mask orientation
APPLIED MATERIALS INC0 citations62
US11766744B2Sep 26, 2023
Method of forming a plurality of gratings
APPLIED MATERIALS INC0 citations62
US11733533B2Aug 22, 2023
Fabrication of diffraction gratings
APPLIED MATERIALS INC0 citations62
US11662516B2May 30, 2023
Method of direct etching fabrication of waveguide combiners
APPLIED MATERIALS INC0 citations62
US11629402B2Apr 18, 2023
Atomic layer deposition on optical structures
APPLIED MATERIALS INC0 citations62
US11630251B2Apr 18, 2023
Mask orientation
APPLIED MATERIALS INC0 citations62
US11557987B2Jan 17, 2023
Handling and processing double-sided devices on fragile substrates
APPLIED MATERIALS INC0 citations62
US11480712B2Oct 25, 2022
Non-absorptive trans-reflective nanostructured RGB filters
APPLIED MATERIALS INC0 citations62
US11473191B2Oct 18, 2022
Method for creating a dielectric filled nanostructured silica substrate for flat optical devices
APPLIED MATERIALS INC0 citations62
US11462386B2Oct 4, 2022
Electron beam apparatus for optical device fabrication
APPLIED MATERIALS INC0 citations62
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
2 patentsUS11402649B2Aug 2, 2022
System and method for optimally forming gratings of diffracted optical elements
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations72
US11016228B2May 25, 2021
System and method for forming diffracted optical element having varied gratings
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
Showing the top 50 of 78 patents by PatentIndex Score.