P

Inventor

MEYER TIMMERMAN THIJSSEN RUTGER

US78 patents
⚠️ This page may combine multiple inventors who share the name “MEYER TIMMERMAN THIJSSEN RUTGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

48 patents
US11247298B2Feb 15, 2022

Method of forming a plurality of gratings

APPLIED MATERIALS INC9 citations86
US10935799B2Mar 2, 2021

Optical component having depth modulated angled gratings and method of formation

APPLIED MATERIALS INC10 citations86
US10823888B1Nov 3, 2020

Methods of producing slanted gratings with variable etch depths

APPLIED MATERIALS INC15 citations86
US10302826B1May 28, 2019

Controlling etch angles by substrate rotation in angled etch tools

APPLIED MATERIALS INC15 citations86
US10234630B2Mar 19, 2019

Method for creating a high refractive index wave guide

APPLIED MATERIALS INC15 citations86
US10775158B2Sep 15, 2020

System and method for detecting etch depth of angled surface relief gratings

APPLIED MATERIALS INC7 citations84
US11670482B2Jun 6, 2023

Modulation of rolling k vectors of angled gratings

APPLIED MATERIALS INC1 citations73
US11512385B2Nov 29, 2022

Method of forming gratings

APPLIED MATERIALS INC3 citations73
US11480724B2Oct 25, 2022

Variable height slanted grating method

APPLIED MATERIALS INC3 citations73
US11456152B2Sep 27, 2022

Modulation of rolling K vectors of angled gratings

APPLIED MATERIALS INC2 citations73
US11380578B2Jul 5, 2022

Formation of angled gratings

APPLIED MATERIALS INC2 citations73
US11372149B2Jun 28, 2022

Depth-modulated slanted gratings using gray-tone lithography and slant etch

APPLIED MATERIALS INC4 citations73
US11367589B2Jun 21, 2022

Modulation of ion beam angle

APPLIED MATERIALS INC1 citations73
US11333896B2May 17, 2022

Fabrication of diffraction gratings

APPLIED MATERIALS INC4 citations73
US11226441B2Jan 18, 2022

Methods of producing slanted gratings with variable etch depths

APPLIED MATERIALS INC4 citations73
US11222809B2Jan 11, 2022

Patterned vacuum chuck for double-sided processing

APPLIED MATERIALS INC2 citations73
US11119405B2Sep 14, 2021

Techniques for forming angled structures

APPLIED MATERIALS INC5 citations73
US11112694B2Sep 7, 2021

Methods of forming variable-depth device structures

APPLIED MATERIALS INC5 citations73
US11029206B2Jun 8, 2021

Methods and apparatus for waveguide metrology

APPLIED MATERIALS INC5 citations73
US11004648B2May 11, 2021

Methods and systems for multi-area selective etching

APPLIED MATERIALS INC2 citations73
US11662524B2May 30, 2023

Forming variable depth structures with laser ablation

APPLIED MATERIALS INC2 citations72
US11487139B2Nov 1, 2022

Nanostructures for optical devices

APPLIED MATERIALS INC3 citations72
US10957512B1Mar 23, 2021

Method and device for a carrier proximity mask

APPLIED MATERIALS INC2 citations71
US10690821B1Jun 23, 2020

Methods of producing slanted gratings

APPLIED MATERIALS INC6 citations71
US11335531B2May 17, 2022

Shadow mask apparatus and methods for variable etch depths

APPLIED MATERIALS INC2 citations68
US11810755B2Nov 7, 2023

Ion beam source for optical device fabrication using a segmented ion source having one or more angled surfaces

APPLIED MATERIALS INC0 citations63
US11764099B2Sep 19, 2023

Patterned chuck for double-sided processing

APPLIED MATERIALS INC0 citations63
US11640898B2May 2, 2023

Methods of optical device fabrication using an ion beam source

APPLIED MATERIALS INC0 citations63
US11581189B2Feb 14, 2023

Controlled hardmask shaping to create tapered slanted fins

APPLIED MATERIALS INC0 citations63
US11289361B2Mar 29, 2022

Patterned chuck for double-sided processing

APPLIED MATERIALS INC0 citations63
US11171010B2Nov 9, 2021

Controlled hardmask shaping to create tapered slanted fins

APPLIED MATERIALS INC0 citations63
US12516410B2Jan 6, 2026

Dielectric filled nanostructured silica substrate for flat optical devices

APPLIED MATERIALS INC0 citations62
US12454751B2Oct 28, 2025

Atomic layer deposition on optical structures

APPLIED MATERIALS INC0 citations62
US12181736B2Dec 31, 2024

Nanostructures for optical devices

APPLIED MATERIALS INC0 citations62
US12130465B2Oct 29, 2024

Variable height slanted grating method

APPLIED MATERIALS INC0 citations62
US12117629B2Oct 15, 2024

Fabrication of optical devices utilizing dicing to maximize chamber space

APPLIED MATERIALS INC0 citations62
US12106935B2Oct 1, 2024

Modulation of rolling k vectors of angled gratings

APPLIED MATERIALS INC0 citations62
US12099241B2Sep 24, 2024

Forming variable depth structures with laser ablation

APPLIED MATERIALS INC0 citations62
US11977246B2May 7, 2024

Mask orientation

APPLIED MATERIALS INC0 citations62
US11766744B2Sep 26, 2023

Method of forming a plurality of gratings

APPLIED MATERIALS INC0 citations62
US11733533B2Aug 22, 2023

Fabrication of diffraction gratings

APPLIED MATERIALS INC0 citations62
US11662516B2May 30, 2023

Method of direct etching fabrication of waveguide combiners

APPLIED MATERIALS INC0 citations62
US11629402B2Apr 18, 2023

Atomic layer deposition on optical structures

APPLIED MATERIALS INC0 citations62
US11630251B2Apr 18, 2023

Mask orientation

APPLIED MATERIALS INC0 citations62
US11557987B2Jan 17, 2023

Handling and processing double-sided devices on fragile substrates

APPLIED MATERIALS INC0 citations62
US11480712B2Oct 25, 2022

Non-absorptive trans-reflective nanostructured RGB filters

APPLIED MATERIALS INC0 citations62
US11473191B2Oct 18, 2022

Method for creating a dielectric filled nanostructured silica substrate for flat optical devices

APPLIED MATERIALS INC0 citations62
US11462386B2Oct 4, 2022

Electron beam apparatus for optical device fabrication

APPLIED MATERIALS INC0 citations62

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

2 patents

Showing the top 50 of 78 patents by PatentIndex Score.