Inventor
LALOVIC IVAN
US19 patents
⚠️ This page may combine multiple inventors who share the name “LALOVIC IVAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
7 patentsUS6853653B2Feb 8, 2005
Laser spectral engineering for lithographic process
CYMER INC74 citations97
US6671294B2Dec 30, 2003
Laser spectral engineering for lithographic process
CYMER INC114 citations97
US7885309B2Feb 8, 2011
Laser system
CYMER INC37 citations92
US7382815B2Jun 3, 2008
Laser spectral engineering for lithographic process
CYMER INC14 citations92
US7999915B2Aug 16, 2011
Laser system
CYMER INC15 citations84
US7139301B2Nov 21, 2006
Laser spectral engineering for lithographic process
CYMER INC9 citations73
US7298770B2Nov 20, 2007
Laser spectral engineering for lithographic process
CYMER INC4 citations62
ADVANCED MICRO DEVICES INC
7 patentsUS6984475B1Jan 10, 2006
Extreme ultraviolet (EUV) lithography masks
ADVANCED MICRO DEVICES INC51 citations96
US7087907B1Aug 8, 2006
Detection of contamination in imaging systems by fluorescence and/or absorption spectroscopy
ADVANCED MICRO DEVICES INC46 citations92
US7081956B1Jul 25, 2006
Method and device for determining reflection lens pupil transmission distribution and illumination intensity distribution in reflective imaging system
ADVANCED MICRO DEVICES INC27 citations92
US6829040B1Dec 7, 2004
Lithography contrast enhancement technique by varying focus with wavelength modulation
ADVANCED MICRO DEVICES INC32 citations92
US7014966B2Mar 21, 2006
Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systems
ADVANCED MICRO DEVICES INC29 citations90
US6977717B1Dec 20, 2005
Method and device for determining projection lens pupil transmission distribution and illumination intensity distribution in photolithographic imaging system
ADVANCED MICRO DEVICES INC8 citations73
US7741012B1Jun 22, 2010
Method for removal of immersion lithography medium in immersion lithography processes
ADVANCED MICRO DEVICES INC1 citations50