Inventor
ASANO TOSHIYA
JP16 patents
⚠️ This page may combine multiple inventors who share the name “ASANO TOSHIYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
8 patentsUS6495847B1Dec 17, 2002
Stage control apparatus and exposure apparatus
CANON KK94 citations98
US5684856ANov 4, 1997
Stage device and pattern transfer system using the same
CANON KK133 citations97
US7067942B2Jun 27, 2006
Linear motor, moving stage system, exposure apparatus, and device manufacturing method
CANON KK26 citations92
US6654098B2Nov 25, 2003
Stage apparatus, exposure apparatus, and device production method
CANON KK30 citations92
US7330093B2Feb 12, 2008
Alignment apparatus, exposure apparatus, and device manufacturing method
CANON KK10 citations83
US7193493B2Mar 20, 2007
Alignment apparatus, exposure apparatus, and device manufacturing method
CANON KK8 citations72
US6867849B2Mar 15, 2005
Stage apparatus which supports interferometer, stage position measurement method, projection exposure apparatus, projection exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory
CANON KK5 citations62
US7348695B2Mar 25, 2008
Linear motor, moving stage system, exposure apparatus, and device manufacturing method
CANON KK1 citations52
NGK SPARK PLUG CO
4 patentsUS5331204AJul 19, 1994
Integrated circuit package in which impendance between signal pads and signal lines is matched by reducing the size of a ground plane
NGK SPARK PLUG CO42 citations92
US8362364B2Jan 29, 2013
Wiring board assembly and manufacturing method thereof
NGK SPARK PLUG CO7 citations83
US7977580B2Jul 12, 2011
Intermediate multilayer wiring board product, and method for manufacturing multilayer wiring board
NGK SPARK PLUG CO7 citations79
US8035035B2Oct 11, 2011
Multi-layer wiring board and method of manufacturing the same
NGK SPARK PLUG CO5 citations62