Inventor
TA YEN B
US4 patents
⚠️ This page may combine multiple inventors who share the name “TA YEN B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7659184B2Feb 9, 2010
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking
APPLIED MATERIALS INC3 citations61
US8003500B2Aug 23, 2011
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking
APPLIED MATERIALS INC1 citations51
US7968401B2Jun 28, 2011
Reducing photoresist layer degradation in plasma immersion ion implantation
APPLIED MATERIALS INC0 citations50