Inventor
PORSHNEV PETER I
US22 patents
⚠️ This page may combine multiple inventors who share the name “PORSHNEV PETER I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS6863019B2Mar 8, 2005
Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas
APPLIED MATERIALS INC608 citations98
US7651384B2Jan 26, 2010
Method and system for point of use recycling of ECMP fluids
APPLIED MATERIALS INC14 citations82
US10529541B2Jan 7, 2020
Inductive plasma source with metallic shower head using B-field concentrator
APPLIED MATERIALS INC3 citations72
US11450509B2Sep 20, 2022
Inductive plasma source with metallic shower head using b-field concentrator
APPLIED MATERIALS INC0 citations62
US8354035B2Jan 15, 2013
Method for removing implanted photo resist from hard disk drive substrates
APPLIED MATERIALS INC4 citations62
US7674723B2Mar 9, 2010
Plasma immersion ion implantation using an electrode with edge-effect suppression by a downwardly curving edge
APPLIED MATERIALS INC2 citations62
US7659184B2Feb 9, 2010
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking
APPLIED MATERIALS INC3 citations61
US9646642B2May 9, 2017
Resist fortification for magnetic media patterning
APPLIED MATERIALS INC0 citations52
US10233538B2Mar 19, 2019
Demagnetization of magnetic media by C doping for HDD patterned media application
APPLIED MATERIALS INC0 citations51
US8003500B2Aug 23, 2011
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking
APPLIED MATERIALS INC1 citations51
US7968401B2Jun 28, 2011
Reducing photoresist layer degradation in plasma immersion ion implantation
APPLIED MATERIALS INC0 citations50
US7723219B2May 25, 2010
Plasma immersion ion implantation process with reduced polysilicon gate loss and reduced particle deposition
APPLIED MATERIALS INC0 citations35